Kalrez®全氟弹性体系列专题讲座(五)Kalrez®在半导体工业中的应用

肖风亮　

摘　要：半导体的加工过程对工程技术人员分别提出了耐热、耐化学介质、超纯净等方面的要求,不同的Kalrez(R)密封件可满足这些要求.该文介绍了不同Kalrez(R)胶料的性能及其在半导体工业中的选择原则,概述了Kalrez(R)胶料在半导体工业常用化学介质中的性能.
关键词：全氟弹性体;半导体;耐化学介质
分类号：TQ333.93　文献标识码：B
文章编号：1671-8232(2007)02-0001-06

Lecture on Kalrez® perfluoroelastomer Ⅴ: Kalrez® for semiconductor applications

XIAO Feng-liang　

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